Silicon layer transfer using wafer bonding and debonding
Cynthia Colinge; Brian Roberds; Brian Doyle
- 作者Cynthia Colinge; Brian Roberds; Brian Doyle
- 卷第30卷
- 期第7期
- 印刷ISSN0361-5235
- 电子ISSN1543-186X
- 文件大小487.60KB
- 发表时间2001
- DOI10.1007/s11664-001-0068-1
- 页码841-844