Structural and electrical properties of sputtered titanium boronitride films
J.F. Pierson; F. Bertran; J.P. Bauer; J. Jolly
- 作者J.F. Pierson; F. Bertran; J.P. Bauer; J. Jolly
- 印刷ISSN0257-8972
- 文件大小148.66KB
- 发表时间2001
- DOI10.1016/s0257-8972(01)01124-0
- 页码906-910