DeleCut: Producing High-Quality SOI Structures by Hydrogen Ion Implantation

V. P. Popov; I. V. Antonova; A. A. Frantsuzov; L. N. Safronov; A. I. Popov; O. V. Naumova; A. Kh. Antonenko; D. V. Kilanov; I. V. Mironova

作者V. P. Popov; I. V. Antonova; A. A. Frantsuzov; L. N. Safronov; A. I. Popov; O. V. Naumova; A. Kh. Antonenko; D. V. Kilanov; I. V. Mironova
卷第31卷
期第4期
印刷ISSN1063-7397
电子ISSN1608-3415
文件大小369.41KB
发表时间2002-07
DOI10.1023/a:1016335113235
页码232-237

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