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An X-ray tomography facility for I.C. industry at STMicroelectronics Grenoble

An X-ray tomography facility for I.C. industry at STMicroelectronics Grenoble

S. Bord; A. Clement; J.C. Lecomte; J.C. Marmeggi

作者S. Bord; A. Clement; J.C. Lecomte; J.C. Marmeggi
印刷ISSN0167-9317
文件大小1116.97KB
发表时间2002
DOI10.1016/s0167-9317(02)00523-3
页码1069-1075

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