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An energy spread correction for depth profiling by elastic recoil detection analysis

An energy spread correction for depth profiling by elastic recoil detection analysis

R.D. Verda; J.R. Tesmer; M. Nastasi; R.W. Bower

作者R.D. Verda; J.R. Tesmer; M. Nastasi; R.W. Bower
卷第187卷
期第3期
印刷ISSN0168-583X
文件大小616.33KB
发表时间2002
DOI10.1016/s0168-583x(01)01138-7
页码383-392

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