Suitable test structures for submicron ion beam analysis
- 作者D. Spemann; T. Reinert; J. Vogt; D. Dobrev; T. Butz
- 卷第190卷
- 印刷ISSN0168-583X
- 文件大小335.30KB
- 发表时间2002
- DOI10.1016/s0168-583x(01)01253-8
- 页码312-317
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