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Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma

Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma

Takashi Goto; Hiroshi Masumoto; Mineo Niizuma

作者Takashi Goto; Hiroshi Masumoto; Mineo Niizuma
卷第75卷
印刷ISSN0254-0584
文件大小230.59KB
发表时间2002
DOI10.1016/s0254-0584(02)00068-8
页码235-240

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