Development of Optical Coatings for 157-nm Lithography. I. Coating Materials
Niisaka, Shunsuke; Saito, Tadahiko; Saito, Jun; Tanaka, Akira; Matsumoto, Akira; Otani, Minoru; Biro, Ryuji; Ouchi, Chidane; Hasegawa, Masanobu; Suzuki, Yasuyuki
- 期刊名称ao/41/16/ao-41-16-3242.pdf
- 作者Niisaka, Shunsuke; Saito, Tadahiko; Saito, Jun; Tanaka, Akira; Matsumoto, Akira; Otani, Minoru; Biro, Ryuji; Ouchi, Chidane; Hasegawa, Masanobu; Suzuki, Yasuyuki
- 卷第41卷
- 期第16期
- 印刷ISSN0003-6935
- 电子ISSN1539-4522
- 文件大小606.46KB
- 发表时间2002
- DOI10.1364/AO.41.003242