Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD
Hironobu Umemoto; Yoshitaka Nozaki; Makiko Kitazoe; Katsuhiko Horii; Kentaro Ohara; Daisuke Morita; Kenji Uchida; Yoriko Ishibashi; Manabu Komoda; Koji Kamesaki; Akira Izumi; Atsushi Masuda; Hideki Matsumura
- 作者Hironobu Umemoto; Yoshitaka Nozaki; Makiko Kitazoe; Katsuhiko Horii; Kentaro Ohara; Daisuke Morita; Kenji Uchida; Yoriko Ishibashi; Manabu Komoda; Koji Kamesaki; Akira Izumi; Atsushi Masuda; Hideki Matsumura
- 印刷ISSN0022-3093
- 文件大小109.14KB
- 发表时间2002
- DOI10.1016/s0022-3093(02)00928-6