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Structural, optical and electrical properties of μc-Si:H deposited by ECR

Structural, optical and electrical properties of μc-Si:H deposited by ECR

M. Mars; M. Fathallah; E. Tresso; S. Ferrero

作者M. Mars; M. Fathallah; E. Tresso; S. Ferrero
印刷ISSN0022-3093
文件大小192.60KB
发表时间2002
DOI10.1016/s0022-3093(02)00929-8

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