Terahertz imaging of silicon wafers
Herrmann, Michael; Tani, Masahiko; Sakai, Kiyomi; Fukasawa, Ryoichi
- 期刊名称Journal of Applied Physics
- 作者Herrmann, Michael; Tani, Masahiko; Sakai, Kiyomi; Fukasawa, Ryoichi
- 卷第91卷
- 期第3期
- 文件大小403.02KB
- 发表时间2002
- DOI10.1063/1.1429772