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Paramagnetic centres and microstructure of reactively sputtered amorphous carbon nitride thin films

Paramagnetic centres and microstructure of reactively sputtered amorphous carbon nitride thin films

Fanchini, G.; Ray, S.C.; Tagliaferro, A.; Laurenti, E.

期刊名称Diamond and Related Materials
作者Fanchini, G.; Ray, S.C.; Tagliaferro, A.; Laurenti, E.
卷第11卷
印刷ISSN0925-9635
文件大小131.33KB
发表时间2002-3
DOI10.1016/S0925-9635(01)00715-4
页码1143-1148

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