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Plasma recovery in plasma immersion ion implantation: dependence on pulse frequency and duty cycle

Plasma recovery in plasma immersion ion implantation: dependence on pulse frequency and duty cycle

Briehl, Boris; Urbassek, Herbert M
  • 期刊名称Journal of Physics D: Applied Physics
  • 作者Briehl, Boris; Urbassek, Herbert M
  • 卷第35卷
  • 期第5期
  • 印刷ISSN0022-3727
  • 电子ISSN1361-6463
  • 文件大小514.56KB
  • 发表时间2002-03-07
  • DOI10.1088/0022-3727/35/5/308
  • 页码462-467
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