[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - Thermo-kinetic actuation for hinged structure batch microassembly
- 作者Kaajakari, V.; Lal, A.
- 文件大小511.30KB
- 发表时间2002
- DOI10.1109/memsys.2002.984238
- 页码196-199
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