[IEEE IEEE-Siberian Conference on Electron Devices and Materials. SIBEDEM-2002 - Tomsk, Russia (2002.03.20-2002.03.20)] IEEE-Siberian Conference on Electron Devices and Materials SIBEDEM - 2002 Proceedings (Cat No 02EX529) SIBEDM-02 - IEEE-Siberian Conference on Electron Devices and Materials. SIBEDEM - 2002. Proceedings (Cat. No.02EX529)