[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Fabrication of flat electrodes with nano-gaps using cluster ion beams
- 作者Taniguchi, M.; Kawai, T.; Watanabe, K.; Matsui, S.; Toyoda, N.; Yamada, I.; Kubota, T.; Mashik, S.
- 文件大小57.60KB
- 发表时间2002
- DOI10.1109/imnc.2002.1178589
- 页码152-153
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