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[IEEE MHS2002. of 2002 International Symposium on Micromechatronics and Human Science - Nagoya, Japan (20-23 Oct. 2002)] Proceedings of 2002 International Symposium on Micromechatronics and Human Science - Design and fabrication of silicon micro components

[IEEE MHS2002. of 2002 International Symposium on Micromechatronics and Human Science - Nagoya, Japan (20-23 Oct. 2002)] Proceedings of 2002 International Symposium on Micromechatronics and Human Science - Design and fabrication of silicon micro components

Buttgenbach, S.

作者Buttgenbach, S.
文件大小1105.03KB
发表时间2002
DOI10.1109/MHS.2002.1058003
页码9-16

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