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Chemical interaction between atomic-layer-deposited HfO[sub 2] thin films and the Si substrate

Cho, Moonju; Park, Jaehoo; Park, Hong Bae; Hwang, Cheol Seong; Jeong, Jaehack; Hyun, Kwang Soo

期刊名称Applied Physics Letters
作者Cho, Moonju; Park, Jaehoo; Park, Hong Bae; Hwang, Cheol Seong; Jeong, Jaehack; Hyun, Kwang Soo
卷第81卷
期第2期
印刷ISSN0003-6951
文件大小562.06KB
发表时间2002
DOI10.1063/1.1492320