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[Japan Soc. Appl. Phys 2002 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2002) - Kobe, Japan (4-6 Sept. 2002)] International Conferencre on Simulation of Semiconductor Processes and Devices - Coupled-field modeling of microdevices and microsystems

[Japan Soc. Appl. Phys 2002 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2002) - Kobe, Japan (4-6 Sept. 2002)] International Conferencre on Simulation of Semiconductor Processes and Devices - Coupled-field modeling of microdevices and microsystems

Wachutka, G.

作者Wachutka, G.
文件大小457.91KB
发表时间2002
DOI10.1109/sispad.2002.1034505
页码9-14

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