Alkyl monolayers on Si(111) as ultrathin electron-beam patterning media
- 作者Taro Yamada; Nao Takano; Keiko Yamada; Shuhei Yoshitomi; Tomoyuki Inoue; Tetsuya Osaka
- 卷第532卷
- 印刷ISSN1572-6657
- 文件大小318.21KB
- 发表时间2002
- DOI10.1016/s0022-0728(02)00865-3
- 页码247-254
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