发现好书期刊,享受阅读乐趣

海量图书期刊资源,随时随地畅享阅读乐趣

Impact of the colloidal silica particle size on physical vapor deposition tungsten removal rate and surface roughness

Impact of the colloidal silica particle size on physical vapor deposition tungsten removal rate and surface roughness

D. Bouvet; P. Beaud; P. Fazan; R. Sanjines; E. Jacquinot
  • 作者D. Bouvet; P. Beaud; P. Fazan; R. Sanjines; E. Jacquinot
  • 文件大小1018.32KB
  • 发表时间2002
  • DOI10.1116/1.1490393
← 返回【学霸图书馆】主页