Pulsed laser deposition of TiO2 for MOS gate dielectric
Roy Paily; Amitava DasGupta; Nandita DasGupta; Pijush Bhattacharya; Pankaj Misra; Tapas Ganguli; Lalit M Kukreja; A.K Balamurugan; S Rajagopalan; A.K Tyagi
- 作者Roy Paily; Amitava DasGupta; Nandita DasGupta; Pijush Bhattacharya; Pankaj Misra; Tapas Ganguli; Lalit M Kukreja; A.K Balamurugan; S Rajagopalan; A.K Tyagi
- 卷第187卷
- 印刷ISSN0169-4332
- 文件大小195.67KB
- 发表时间2002
- DOI10.1016/s0169-4332(01)01040-6
- 页码297-304