In situ chamber cleaning using atomic H in catalytic-CVD apparatus for mass production of a-Si:H solar cells
- 作者Atsushi Masuda; Yoriko Ishibashi; Kenji Uchida; Koji Kamesaki; Akira Izumi; Hideki Matsumura
- 卷第74卷
- 印刷ISSN0927-0248
- 文件大小89.33KB
- 发表时间2002
- DOI10.1016/s0927-0248(02)00130-7
- 页码373-377
Role of Bandgap Grading for the Performance of Microcrystalline Silicon Germanium Solar CellsKrause, M.; Carius, R.; Stiebig, H.; Finger, F.; Lundszien, D.; Wagner, H. · MRS Proceedings · 1999
Development of highly efficient thin film silicon solar cells on texture-etched zinc oxide-coated glass substratesJ Müller; O Kluth; S Wieder; H Siekmann; G Schöpe; W Reetz; O Vetterl; D Lundszien; A Lambertz; F Finger; B Rech; H Wagner · 2001
[IEEE Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference - 1996 - Washington, DC, USA (1996.05.13-1996.05.17)] Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference - 1996 - Role of bandgap grading for the performance of a-SiGe:H based solar cellsFolsch, J.; Stiebig, H.; Finger, F.; Rech, B.; Lundszien, D.; Lambertz, A.; Wagner, H. · 1996