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Transport and Chemical Mechanisms in GaN Hydride Vapor Phase Epitaxy

Transport and Chemical Mechanisms in GaN Hydride Vapor Phase Epitaxy

Karpov, Sergey Yu.; Segal, Alexander S.; Zimina, Darya V.; Smirnov, Sergey A.; Sid'ko, Alexander P.; Kondratyev, Alexey V.; Makarov, Yuri N.; Martin, Denis; Wagner, Volker; Ilegems, Marc
  • 期刊名称MRS Proceedings
  • 作者Karpov, Sergey Yu.; Segal, Alexander S.; Zimina, Darya V.; Smirnov, Sergey A.; Sid'ko, Alexander P.; Kondratyev, Alexey V.; Makarov, Yuri N.; Martin, Denis; Wagner, Volker; Ilegems, Marc
  • 卷第743卷
  • 电子ISSN1946-4274
  • 文件大小171.97KB
  • 发表时间2002-1
  • DOI10.1557/proc-743-l3.40
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