XPS analysis of FIB-milled Si
- 作者Amy C. Ferryman; Julia E. Fulghum; Lucille A. Giannuzzi; Fred A. Stevie
- 卷第33卷
- 期第12期
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小330.86KB
- 发表时间2002
- DOI10.1002/sia.1448
- 页码907-913
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