SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - GaN micromachining by short wavelength pulsed laser irradiation
Akane, Toshimitsu; Sugioka, Koji; Obata, Kotaro; Aoki, Naoko; Toyoda, Koichi; Midorikawa, Katsumi; Miyamoto, Isamu; Lu, Yong Feng; Sugioka, Koji; Dubowski, Jan J.
- 作者Akane, Toshimitsu; Sugioka, Koji; Obata, Kotaro; Aoki, Naoko; Toyoda, Koichi; Midorikawa, Katsumi; Miyamoto, Isamu; Lu, Yong Feng; Sugioka, Koji; Dubowski, Jan J.
- 卷第4426卷
- 印刷ISSN0277-786X
- 文件大小262.83KB
- 发表时间2002
- DOI10.1117/12.456899
- 页码445-448