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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Strategy towards fusion of nano and micro systems

SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Strategy towards fusion of nano and micro systems

Shimoyama, Isao; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro

作者Shimoyama, Isao; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro
卷第4936卷
印刷ISSN0277-786X
文件大小256.66KB
发表时间2002
DOI10.1117/12.499601

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