Laser Thermal Processing of Alternate Dopants in Silicon
- 期刊名称MRS Proceedings
- 作者Clark, Mark H.; Jones, Kevin S.; Rendon, Michael; Gable, Kevin A.
- 卷第717卷
- 印刷ISSN0272-9172
- 电子ISSN1946-4274
- 文件大小230.91KB
- 发表时间2002
- DOI10.1557/PROC-717-C1.11
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