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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Nonlinear effects in MEMS capacitive microphone design

[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Nonlinear effects in MEMS capacitive microphone design

Chowdhury, S.; Ahmadi, M.; Miller, W.C.

作者Chowdhury, S.; Ahmadi, M.; Miller, W.C.
文件大小325.46KB
发表时间2003
DOI10.1109/icmens.2003.1222013
页码297-302

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