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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Dynamics and touchdown in electrostatic MEMS

[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Dynamics and touchdown in electrostatic MEMS

Flores, G.; Mercado, G.A.; Pelesko, J.A.

作者Flores, G.; Mercado, G.A.; Pelesko, J.A.
文件大小557.68KB
发表时间2003
DOI10.1109/icmens.2003.1221990
页码182-187

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