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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Effects of electrostatic charge accumulation during MEMS fabrication

[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Effects of electrostatic charge accumulation during MEMS fabrication

Antoniu, A.; Salomons, M.; Reus, N.

作者Antoniu, A.; Salomons, M.; Reus, N.
文件大小2337.43KB
发表时间2003
DOI10.1109/icmens.2003.1221967
页码69-75

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