Harmonic content and time variation of electron energy distributions in high-plasma-density, low-pressure inductively coupled discharges

• 期刊名称Journal of Applied Physics
• 作者Vasenkov, Alex V.; Kushner, Mark J.
• 卷第94卷
• 期第4期
• 印刷ISSN0021-8979
• 文件大小719.76KB
• 发表时间2003
• DOI10.1063/1.1592630