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Parallax measurements of integrated circuit interconnects using a scanning transmission electron microscope

Levine, Zachary H.; Gao, James J.; Neogi, Suneeta; Levin, T. M.; Scott, John Henry; Grantham, Steven

期刊名称Journal of Applied Physics
作者Levine, Zachary H.; Gao, James J.; Neogi, Suneeta; Levin, T. M.; Scott, John Henry; Grantham, Steven
卷第93卷
期第4期
印刷ISSN0021-8979
文件大小456.92KB
发表时间2003
DOI10.1063/1.1538336