Interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma investigated by in situ real-time infrared absorption spectroscopy

Shinohara, Masanori; Kuwano, Takayuki; Akama, Yosuke; Kimura, Yasuo; Niwano, Michio; Ishida, Hiroyasu; Hatakeyama, Rikizo

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Shinohara, Masanori; Kuwano, Takayuki; Akama, Yosuke; Kimura, Yasuo; Niwano, Michio; Ishida, Hiroyasu; Hatakeyama, Rikizo
卷第21卷
期第1期
印刷ISSN0734-2101
文件大小436.14KB
发表时间2003
DOI10.1116/1.1524146

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