[Japan Soc. Promotion of Sci International Vacuum Microelectronics Conference - Osaka, Japan (7-11 July 2003)] IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) - MOLD type multifunctional FEA/SNOM device
- 作者Dziuban, J.; Gorecka-Drzazga, A.; Bargiel, S.
- 文件大小59.26KB
- 发表时间2003
- DOI10.1109/ivmc.2003.1223046
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