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Miniaturized electrostatic analyzer manufactured using photolithographic etching

Miniaturized electrostatic analyzer manufactured using photolithographic etching

Enloe, C. L.; Krause, L. Habash; Haaland, R. K.; Patterson, T. T.; Richardson, C. E.; Lazidis, C. C.; Whiting, R. G.
  • 期刊名称Review of Scientific Instruments
  • 作者Enloe, C. L.; Krause, L. Habash; Haaland, R. K.; Patterson, T. T.; Richardson, C. E.; Lazidis, C. C.; Whiting, R. G.
  • 卷第74卷
  • 期第3期
  • 印刷ISSN0034-6748
  • 文件大小581.58KB
  • 发表时间2003
  • DOI10.1063/1.1540715
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