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[IEEE 2003 8th International Symposium on Plasma- and Process-Induced Damage - Corbeil-Essonnes, France (24-25 April 2003)] 2003 8th International Symposium Plasma- and Process-Induced Damage. - Comprehending scaling effects on plasma damage

[IEEE 2003 8th International Symposium on Plasma- and Process-Induced Damage - Corbeil-Essonnes, France (24-25 April 2003)] 2003 8th International Symposium Plasma- and Process-Induced Damage. - Comprehending scaling effects on plasma damage

Krishnan, A.T.; Krishnan, S.

作者Krishnan, A.T.; Krishnan, S.
文件大小380.63KB
发表时间2003
DOI10.1109/ppid.2003.1199723
页码28-31

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