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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Transition of MEMS technology to nanofabrication

[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Transition of MEMS technology to nanofabrication

Jakeway, S.C.; Crabtree, H.J.; Veres, T.; Cameron, N.S.; Luesebrink, H.; Glinsner, T.
  • 作者Jakeway, S.C.; Crabtree, H.J.; Veres, T.; Cameron, N.S.; Luesebrink, H.; Glinsner, T.
  • 文件大小504.41KB
  • 发表时间2003
  • DOI10.1109/icmens.2003.1221977
  • 页码118-122
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