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[IEEE 15th Biennial University/Government/Industry Microelectronics Symposium - Boise, ID, USA (30 June-2 July 2003)] Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) - Bulk micromachined pressure sensor

[IEEE 15th Biennial University/Government/Industry Microelectronics Symposium - Boise, ID, USA (30 June-2 July 2003)] Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) - Bulk micromachined pressure sensor

Fuller, L.F.; Sudirgo, S.

作者Fuller, L.F.; Sudirgo, S.
文件大小266.26KB
发表时间2003
DOI10.1109/ugim.2003.1225752
页码317-320

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