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Effects of the substrate on the determination of hardness of thin films by the nanoscratch and nanoindentation techniques: A comparative study for the cases of soft film on hard substrate and hard film on soft substrate.

Effects of the substrate on the determination of hardness of thin films by the nanoscratch and nanoindentation techniques: A comparative study for the cases of soft film on hard substrate and hard film on soft substrate.

Tayebi, Noureddine; Polycarpou, Andreas A.; Conry, Thomas F.
  • 期刊名称MRS Proceedings
  • 作者Tayebi, Noureddine; Polycarpou, Andreas A.; Conry, Thomas F.
  • 卷第795卷
  • 电子ISSN1946-4274
  • 文件大小143.90KB
  • 发表时间2003-1
  • DOI10.1557/PROC-795-U7.5
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