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Single Chemistry Cleaning Solutions for Advanced Wafer Cleaning

Single Chemistry Cleaning Solutions for Advanced Wafer Cleaning

Vos, Rita; Lux, Marcel; Arnauts, Sophia; Kenis, Karine; Maes, M.; Onsia, Bart; Snow, James; Holsteyns, Frank; Vereecke, Guy; Mertens, Paul W.; Heyns, Marc M.; Doll, O.; Fester, A.; Kolbesen, Bernd O.; Hackett, T.; Hoffman, Mark
  • 期刊名称Solid State Phenomena
  • 作者Vos, Rita; Lux, Marcel; Arnauts, Sophia; Kenis, Karine; Maes, M.; Onsia, Bart; Snow, James; Holsteyns, Frank; Vereecke, Guy; Mertens, Paul W.; Heyns, Marc M.; Doll, O.; Fester, A.; Kolbesen, Bernd O.; Hackett, T.; Hoffman, Mark
  • 卷第92卷
  • 电子ISSN1662-9779
  • 文件大小443.43KB
  • 发表时间2003
  • DOI10.4028/www.scientific.net/SSP.92.27
  • 页码27-32
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