Room-temperature growth of cubic nitride boron film by RF plasma enhanced pulsed laser deposition
C.Y. Zhang; X.L. Zhong; J.B. Wang; G.W. Yang
- 作者C.Y. Zhang; X.L. Zhong; J.B. Wang; G.W. Yang
- 卷第370卷
- 印刷ISSN0009-2614
- 文件大小171.58KB
- 发表时间2003
- DOI10.1016/s0009-2614(02)01987-5
- 页码522-527