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Room-temperature growth of cubic nitride boron film by RF plasma enhanced pulsed laser deposition

Room-temperature growth of cubic nitride boron film by RF plasma enhanced pulsed laser deposition

C.Y. Zhang; X.L. Zhong; J.B. Wang; G.W. Yang
  • 作者C.Y. Zhang; X.L. Zhong; J.B. Wang; G.W. Yang
  • 卷第370卷
  • 印刷ISSN0009-2614
  • 文件大小171.58KB
  • 发表时间2003
  • DOI10.1016/s0009-2614(02)01987-5
  • 页码522-527
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