SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining Technology for Micro-Optics and Nano-Optics - Microfabrication of controlled angle diffusers used for resolution enhancement in microlithography
- 作者Himel, Marc D.; Poutous, Menelaos K.; Stack, Jared D.; Leonard, Jerry L.; Johnson, Eric G.
- 卷第4984卷
- 印刷ISSN0277-786X
- 文件大小370.49KB
- 发表时间2003
- DOI10.1117/12.477845
- 页码230-233
SPIE Proceedings [SPIE International Symposium on Photonics and Optics - Shanghai, China (Saturday 22 August 2015)] International Symposium on Photonics and Optoelectronics 2015 - Front Matter: Volume 96562015
SPIE Proceedings [SPIE Ninth International Symposium on Laser Metrology - Unknown, Singapore (Monday 30 June 2008)] Ninth International Symposium on Laser Metrology - Front Matter: Volume 7155SPIE, Proceedings of; Quan, Chenggen; Asundi, Anand · 2008
SPIE Proceedings [SPIE Sixth International Symposium on Display Holography - Lake Forest, IL (Monday 21 July 1997)] Sixth International Symposium on Display Holography - <title>Holography in Japan</title>Kubota, Toshihiro; Jeong, Tung H. · 1998
SPIE Proceedings [SPIE Sixth International Symposium on Display Holography - Lake Forest, IL (Monday 21 July 1997)] Sixth International Symposium on Display Holography - <title>Tunnel of light</title>Ohlmann, Dietmar; Jeong, Tung H. · 1998
SPIE Proceedings [SPIE Sixth International Symposium on Display Holography - Lake Forest, IL (Monday 21 July 1997)] Sixth International Symposium on Display Holography - <title>Holography in Sweden</title>Abramson, Nils H.; Jeong, Tung H. · 1998
SPIE Proceedings [SPIE International Symposium on Photonics and Optoelectronics (SOPO 2014) - Suzhou, China (Friday 22 August 2014)] International Symposium on Photonics and Optoelectronics 2014 - Front Matter: Volume 92332014
SPIE Proceedings [SPIE 1992 Shanghai International Symposium on Quantum Optics - Shanghai, China (Sunday 29 March 1992)] 1992 Shanghai International Symposium on Quantum Optics - <title>Photonic superguiding state</title>Ze, Cheng; Wang, Yuzhu; Wang, Yiqiu; Wang, Zugeng · 1992
SPIE Proceedings [SPIE Sixth International Symposium on Display Holography - Lake Forest, IL (Monday 21 July 1997)] Sixth International Symposium on Display Holography - <title>Playmates to primates</title>Olson, Bernadette L.; Olson, Ron B.; Jeong, Tung H. · 1998