SPIE Proceedings [SPIE LAMP 2002: International Congress on Laser Advanced Materials Processing - Osaka, Japan (Monday 27 May 2002)] Third International Symposium on Laser Precision Microfabrication - Precision microfabrication with Q-switched CO<formula><inf><roman>2</roman></inf></formula> lasers
- 作者Dunsky, Corey M.; Matsumoto, Hisashi; Miyamoto, Isamu; Kobayashi, Kojiro F.; Sugioka, Koji; Poprawe, Reinhart; Helvajian, Henry
- 卷第4830卷
- 印刷ISSN0277-786X
- 文件大小514.61KB
- 发表时间2003
- DOI10.1117/12.486600
- 页码85-90
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