Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors
- 作者Albena Paskaleva; Martin Lemberger; Stefan Zürcher; Anton J. Bauer; Lothar Frey; Heiner Ryssel
- 卷第43卷
- 期第8期
- 印刷ISSN0026-2714
- 文件大小315.05KB
- 发表时间2003
- DOI10.1016/s0026-2714(03)00180-x
- 页码1253-1257