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Metastable-atom-stimulated desorption from hydrogen-passivated silicon surfaces

Metastable-atom-stimulated desorption from hydrogen-passivated silicon surfaces

Yasushi Yamauchi; Xin Ju; Taku Suzuki; Mitsunori Kurahashi

作者Yasushi Yamauchi; Xin Ju; Taku Suzuki; Mitsunori Kurahashi
卷第528卷
印刷ISSN0039-6028
文件大小112.12KB
发表时间2003
DOI10.1016/s0039-6028(02)02615-8
页码91-96

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