Ion beam assisted deposition of metal layers using a novel one beam system

• 作者F.F. Komarov; A.A. Kamarou; P. Żukowski; Cz. Karwat; J. Sielanko; Cz.M. Kozak; K. Kiszczak
• 卷第70卷
• 印刷ISSN0042-207X
• 文件大小154.90KB
• 发表时间2003
• DOI10.1016/s0042-207x(02)00645-0
• 页码215-220