Stress development during thin film growth and its modification under ion irradiation

• 作者T. Pieńkos; L. Gładyszewski; A. Prószyński; D. Chocyk; G. Gładyszewski; F. Martin; C. Jaouen; M. Drouet; B. Lamongie
• 卷第70卷
• 印刷ISSN0042-207X
• 文件大小359.02KB
• 发表时间2003
• DOI10.1016/s0042-207x(02)00650-4
• 页码243-248