Fabrication of SiC microelectromechanical systems using one-step dry etching

• 作者L. Jiang; R. Cheung; M. Hassan; A. J. Harris; J. S. Burdess; C. A. Zorman; M. Mehregany
• 文件大小602.08KB
• 发表时间2003
• DOI10.1116/1.1627804