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Similarities in the electrical conduction processes in hydrogenated amorphous silicon oxynitride and silicon nitride

Similarities in the electrical conduction processes in hydrogenated amorphous silicon oxynitride and silicon nitride

H. Kato; H. Sato; Y. Ohki; K. S. Seol; T. Noma

作者H. Kato; H. Sato; Y. Ohki; K. S. Seol; T. Noma
文件大小122.32KB
发表时间2003
DOI10.1088/0953-8984/15/13/305

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